Meaning
High-resolution measurement technique uses a physical stylus to map the surface geometry of miniature components. Through tactile micro-probing, metrology labs verify the dimensional accuracy of micro-electromechanical systems where optical methods lack sufficient depth perception.
Extremely Low
Extremely low contact forces are used to prevent the stylus from damaging or deforming the delicate features of the workpiece. During tactile micro-probing, the probe tip deflects slightly upon contact, and this displacement is converted into a digital coordinate. The diameter of the tip determines the smallest feature that the system can accurately resolve.
Roughness Level
Roughness and waviness are measured at a scale that reveals the microscopic effects of machining processes. Because tactile micro-probing provides a direct physical measurement, it is not affected by the color, transparency, conductivity, or reflectivity of the material. This makes it suitable for inspecting glass, polished metals, and polymers with equal reliability.
Wear Detection
Wear on the stylus can lead to measurement errors that are difficult to detect without regular validation against a known standard. Constant use in a production environment necessitates a scheduled replacement of tips used for tactile micro-probing to ensure the integrity of the data. Checking the probe for contamination is also required, as a single dust particle can distort the profile of a micro-feature and lead to a false rejection of a high-value batch.